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Mechanical Engineering

University of Arkansas, Fayetteville

Nanoindentation

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Full-Text Articles in Nanoscience and Nanotechnology

A Nanoindentation Study Of The Fatigue Properties Of Al/A-Si Core-Shell Nanostructures, Jason Steck May 2018

A Nanoindentation Study Of The Fatigue Properties Of Al/A-Si Core-Shell Nanostructures, Jason Steck

Mechanical Engineering Undergraduate Honors Theses

Nanostructure-textured surfaces can reduce friction and increase the reliability of micro- and nanoelectromechanical systems (NEMS/MEMS). For MEMS incorporating moving parts, the fatigue properties of nanostructures pose a challenge to their reliability in long-term applications. In this study, the fatigue behavior of hemispherical Al/a-Si core-shell nanostructures (CSNs), bare hemispherical Al nanodots, and a flat Al/a-Si layered thin film have been studied using nanoindentation and nano-scale dynamic mechanical analysis (nano-DMA) techniques. Fatigue testing with nano-DMA shows that the deformation resistance of CSNs persists through 5.0 × 104 loading cycles at estimated contact pressures greater than 15 GPa. When the a-Si shell …


Design, Fabrication, Testing Of Cnt Based Isfet And Characterization Of Nano/Bio Materials Using Afm, Zhuxin Dong Dec 2012

Design, Fabrication, Testing Of Cnt Based Isfet And Characterization Of Nano/Bio Materials Using Afm, Zhuxin Dong

Graduate Theses and Dissertations

A combination of Carbon Nanotubes (CNTs) and Ion Selective Field Effect Transistor (ISFET) is designed and experimentally verified in order to develop the next generation ion concentration sensing system. Micro Electro-Mechanical System (MEMS) fabrication techniques, such as photolithography, diffusion, evaporation, lift-off, packaging, etc., are required in the fabrication of the CNT-ISFET structure on p-type silicon wafers. In addition, Atomic Force Microscopy (AFM) based surface nanomachining is investigated and used for creating nanochannels on silicon surfaces. Since AFM based nanomanipulation and nanomachining is highly controllable, nanochannels are precisely scratched in the area between the source and drain of the FET where …