Nanoscience and Nanotechnology Commons^™

On Developing Novel Energy-Relates Nanostructured Materials By Atomic Layer Deposition, Xiangbo Meng

Electronic Thesis and Dissertation Repository

ABSTRACT

This thesis presents the fabrication of a series of novel nanostructured materials using atomic layer deposition (ALD). In contrast to traditional methods including chemical vapor deposition (CVD), physical vapor deposition (PVD), and solution-based processes, ALD benefits the synthesis processes of nanostructures with many unrivalled advantages such as atomic-scale control, low temperature, excellent uniformity and conformality. Depending on the employed precursors, substrates, and temperatures, the ALD processes exhibited different characteristics. In particular, ALD has capabilities in fine-tuning compositions and structural phases. In return, the synthesis and the resultant nanostructured materials show many novelties.

This thesis covers ALD processes of four …

Synthesis, Processing And Characterization Of Silicon-Based Templated Nanowires, Jae Ho Lee

Legacy Theses & Dissertations (2009 - 2024)

Semiconductor and metallic nanowires have attracted substantial attention due to their wide variety of applications, ranging from nanoelectronics to energy storage devices. In particular, self-assembled silicon nanowires (SiNWs) may be an attractive alternative to conventionally processed planar silicon since SiNWs can potentially function as both the switch (i.e. transistor) and local interconnect (e.g. metal silicide nanowire) to form an inherently integrated nanoelectronic system. Also, hierarchical (branched) nanowire systems hold potential for catalysts or porous electrode applications for energy applications