Nanoscience and Nanotechnology Commons^™

Determination Of Current Density Distribution In An Electron Beam, Yudhishthir Prasad Kandel

Legacy Theses & Dissertations (2009 - 2024)

Electron beams are useful in many applications because they can be focused down to a spot far exceeding the physical limit of focusing visible light or x-rays. Additionally, electron beams are useful in transferring concentrated amounts of energy to a very small well defined region of a target for a fixed duration. This has led to the development of both scanning electron microscopes (SEMs) and electron beam lithography. The goal of this work was to develop a general method that accurately and easily yields the best estimate of the electron current density distribution of a focused electron beam, known as …