Nanoscience and Nanotechnology Commons^™

Microwave Acoustic Saw Resonators For Stable High-Temperature Harsh-Environment Static And Dynamic Strain Sensing Applications, Anin K. Maskay

Electronic Theses and Dissertations

High-temperature, harsh-environment static and dynamic strain sensors are needed for industrial process monitoring and control, fault detection, structural health monitoring in power plant environments, steel and refractory material manufacturing, aerospace, and defense applications. Sensor operation in the aforementioned extreme environments require robust devices capable of sustaining the targeted high temperatures, while maintaining a stable sensor response. Current technologies face challenges regarding device or system size, complexity, operational temperature, or stability.

Surface acoustic wave (SAW) sensor technology using high temperature capable piezoelectric substrates and thin film technology has favorable properties such as robustness; miniature size; capability of mass production; reduced installation …

Low-Temperature Fabrication Process For Integrated High-Aspect Ratio Metal Oxide Nanostructure Semiconductor Gas Sensors, William Paul Clavijo

Theses and Dissertations

This work presents a new low-temperature fabrication process of metal oxide nanostructures that allows high-aspect ratio zinc oxide (ZnO) and titanium dioxide (TiO₂) nanowires and nanotubes to be readily integrated with microelectronic devices for sensor applications. This process relies on a new method of forming a close-packed array of self-assembled high-aspect-ratio nanopores in an anodized aluminum oxide (AAO) template in a thin (2.5 µm) aluminum film deposited on a silicon and lithium niobate substrate (LiNbO₃). This technique is in sharp contrast to traditional free-standing thick film methods and the use of an integrated thin aluminum film …