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Fabrication Of Single Nanowire Device Using Electron Beam Lithography, Thach Pham

Graduate Theses and Dissertations

One dimensional nanostructure materials such as nanowires have drawn many interests among the scientific community for a wide range of applications such as field-effect transistors [1], [2], inverters[3], light-emitting diode [1], lasers [4], nanosensors [5], [6], and photodetectors [7]... Comparing with the characterization of nanowire arrays, characterizing a single nanowire will definitely provide a better understanding on new nanowire properties due to simplified behaviors of devices. Although promising theories could be drawn from those results, fabrication of test structure for single nanowire measurements cannot be easily processed using standard microfabrication techniques. Therefore, electron beam lithography integrated with photolithography technique has …