Mechanical Engineering Commons^™

Mathematical Modeling For Fabricating A Microstructure With A Pre-Specified Geometry Using Laser -Induced Chemical Vapor Deposition, Chaoyang Zhang

Doctoral Dissertations

Laser-induced chemical vapor deposition (LCVD) is an emerging new technique with many practical applications. To optimize the system for fabricating a microstructure with a pre-specified geometry in pyrolytic LCVD, a three-dimensional mathematical model is developed for predicting temperature distributions and laser dwell times across the substrate scanned by the laser beam. A microstructure is fabricated layer by layer, and for each layer the laser beam moves from one pixel to the next. The complicated correlations among temperature distribution, deposit growth rate, and laser dwell time are investigated. A purely heterogeneous reaction is assumed and any gas-phase transport is ignored.

A …

Kinetics Of Laser Chemical Vapor Deposition Of Carbon And Refractory Metals, Feng Gao

Doctoral Dissertations

Three-dimensional laser chemical vapor deposition (3D-LCVD) has been used to grow rods of carbon, tungsten, titanium, and hafnium from a variety of hydrocarbons and metal halide-based precursors. A novel computerized 3D-LCVD system was designed and successfully used in the experiments. A focused Nd:Yag laser beam (λ = 1.06 μm) was utilized to locally heat up a substrate to deposition temperature. The rods, which grew along the axis of the laser beam, had a typical diameter of 30–80 μm and a length of about 1 mm. The precursors for carbon deposition were the alkynes: propyne, butyne, pentyne, hexyne, and octyne. Propyne …