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Structural And Photoluminescence Properties Of Zno Thin Films Deposited By Ultrasonic Spray Pyrolysis, Iwan Sugihartono, Erfan Handoko, Vivi Fauzia, Artoto Arkundato, Lara Permata Sari

Makara Journal of Technology

Zinc oxide (ZnO) thin films on a silicon (Si) (111) substrate were grown herein using ultrasonic spray pyrolysis at 450 °C with different Zn concentrations. The ZnO thin films had X-ray diffraction patterns of a polycrystalline hexagonal wurtzite structure. The (002) and (101) peak intensities changed under different Zn concentrations. Furthermore, according to Scherer's and Stokes–Wilson equations, the crystallite size and the internal strain of the ZnO thin films in the (002) and (101) peaks changed with the Zn concentration. Optically, the photoluminescence spectra indicated that the ratio of the UV/GB emission of the ZnO thin films was the highest …