Mechanical Engineering Commons^™

Femtosecond Laser Micro-Structuring Of Silicon Wafer In Water Confinement, Songping Wu

Masters Theses

"This thesis investigates the use of femtosecond laser induced surface morphology on silicon wafer surface in water confinement. Unlike irradiation of silicon surfaces in the air, there are no laser induced periodic structures, but irregular roughness is formed when the silicon wafer is ablated under water. Interestingly, a particular parameter combination enables a smooth surface, which can improve the surface quality of micro-machining products. This thesis first investigates the single ablation and multi-pulse ablation processes in order to study the effects of laser parameters on ablation morphology, as well as the basic physics and mechanism of the laser-material interaction process …