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Full-Text Articles in Mechanical Engineering
Liga Mold Insert Fabrication Using Su-8 Photoresist, Jian Zhang
Liga Mold Insert Fabrication Using Su-8 Photoresist, Jian Zhang
LSU Master's Theses
The LIGA process potentially enables economic mass-production of devices with high aspect ratio geometry. Central to the LIGA process is the fabrication of high quality LIGA molds. But in the traditional LIGA mold insert fabrication process, the x-ray photoresist poly-methyl-methacrylate (PMMA) is not highly sensitive to x-rays and a thick piece of PMMA sheet (>1mm) needs too much time to get exposed (bottom dose: 3500J/cm3), which results in excessive cost/ fabrication difficulty of the mold insert. Thus, in this thesis a negative photoresist SU-8 was tested as an x-ray photoresist in the LIGA fabrication process. SU-8 is much more …
Development Of A Micro Power Relay With Static Electrical Actuator, Ren Yang
Development Of A Micro Power Relay With Static Electrical Actuator, Ren Yang
LSU Master's Theses
In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. …
A New Approach To Evaluate Fracture Strength Of Uv-Liga Fabricated Nickel Specimens, Catherine Oropeza
A New Approach To Evaluate Fracture Strength Of Uv-Liga Fabricated Nickel Specimens, Catherine Oropeza
LSU Master's Theses
One of the major difficulties faced by MEMS researchers today is the lack of data regarding properties of electroplated metals or alloys at micro-levels as those produced by the LIGA and LIGA related process. These mechanical properties are not well known and they cannot be extrapolated from macro-scale data without experimental verification. This lack of technical information about microscale physical properties has affected the consistency and reliability of batch-fabricated components and leads to very low rates of successful fabrication. Therefore, this material issue is of vital importance to the development of LIGA technology and to its industrial applications. This thesis …