Mechanical Engineering Commons^™

Structural Characterization Of Aluminum Films Deposited On Sputtered-Titanium Nitride/ Silicon Substrate By Metalorganic Chemical Vapor Deposition From Dimethylethylamine Alane, Xiaodong Li, Byoung-Youp Kim, Shi-Woo Rhee

Faculty Publications

Alfilmsdeposited on sputtered‐TiN/Si substrate by metalorganic chemical vapor deposition(MOCVD) from dimethylethylamine alane (DMEAA) were characterized using x‐ray diffraction(XRD),Auger electron spectroscopy(AES),atomic force microscopy(AFM), and transmission electron microscopy (TEM). The TiN filmsputtered on the Si has a preferred orientation along the growth direction with the 〈111〉 of the film parallel to the Si〈111〉. Sputtering of the TiN film on the Si induced strains at the interface. The TiN/Si interface is flat while the Al/TiN interface is rough. There exist many dislocations at the Al/TiN interface. The Al₂O₃ phase was formed at the Al/TiN interface during the early stages of …

Otter: A Testbed Submersible For Robotics Research, Tim Mclain, H H. Wang, R L. Marks, S D. Fleischer, D W. Miles, G A. Sapilewski, S M. Rock, M J. Lee, R C. Burton

Faculty Publications

Untethered, unmanned submersibles (UUSs) have the potential of becoming useful tools in nuclear reactor inspection and repair and waste-site cleanup and survey, in addition to subsea exploration. Classical "hand-in-glove" control methods used currently by tethered, remotely-operated vehicles (ROVs) are unsuitable for UUS systems which have, at best, limited communications. The Stanford Aerospace Robotics Laboratory (ARL) has joined with the Monterey Bay Aquarium Research Institute (MBARI) in a program to develop new methods of controlling UUS systems.

As a part of this effort, a submersible testbed has been built to test and develop new technologies that will make UUSs useful tools …