Mechanical Engineering Commons^™

Enhanced Purity Andresolution Via Laser Assistedelectron Beam Induced Deposition Of Platinum,, Nick A. Roberts, J. D. Fowlkes, G. A. Magel, P. D. Rack

Nick Roberts

We introduce a laser assisted electron beam induced deposition (LAEBID) process which is a nanoscale direct write synthesis method that integrates an electron beam induced deposition process with a synchronized pulsed laser step to induce thermal desorption of reaction by-products. Localized, spatially overlapping electron and photon pulses enable the thermal desorption of the reaction by-product while mitigating issues associated with bulk substrate heating, which can shorten the precursor residence time and distort pattern fidelity due to thermal drift. Current results demonstrate purification of platinum deposits (reduced carbon content by ~50%) with the addition of synchronized laser pulses as well as …