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Full-Text Articles in Mechanical Engineering
Intrinsic Stress And High Temperature Properties Of Metal-Contanining Hydrogenated Amorphous Carbon Coatings, Bo Shi
LSU Doctoral Dissertations
A detailed examination of the intrinsic stress development and mechanical properties of titanium-containing hydrogenated amorphous carbon (Ti-C:H) and W-C:H coatings, deposited in an inductively coupled plasma (ICP) assisted hybrid chemical/physical vapor deposition (CVD/PVD) environment was carried out. Intrinsic stresses within those coatings were found to be compressive and dependent on compositions. The intrinsic compression within Ti-C:H was further shown to be significantly influenced by the energy of ionic species bombarding the substrate during growth. The results suggested that ion bombardment played a significant role in intrinsic stress generation within Ti-C:H, and was likely to influence stress development in other low …