Mechanical Engineering Commons^™

Simulation Of Magnetically Confined Inductively Coupled Plasma, Sina Javadpour

Electronic Theses and Dissertations

In this work, a new parallel coil design was presented to address the need for high density inductively coupled plasmas with enhanced properties and a more uniform and consistent distribution, suitable for large-area material processing. Fluid model simulations of 3D argon inductively coupled plasma (ICP) were performed in COMSOL for the proposed coil and a conventional single cylindrical coil with the same impedance to be used as reference, to compare and evaluate the performance of this new halftoroidal parallel coil design and study its effects on the main variables of the generated plasma. Through different comparisons of the simulations results, …