Mechanical Engineering Commons^™

Study Of The 3Ω Measurement Of The In-Plane And The Cross-Plane Thermal Properties On Anisotropic Thin Film Materials, Daxi Zhang

All Graduate Theses and Dissertations, Spring 1920 to Summer 2023

Due to the size of the nano-scale and micro-scale materials, traditional method for measuring the thermal properties of the bulk materials cannot be applied. The 3 Omega Method was developed by D. G. Cahill in the early 90s. It was used extensively to measure the thermal properties of thin film dielectric materials. Compare with other simulations or experimental methods, the 3 Omega Method has many advantages. Previous research has indicate that the 3 Omega method is capable of measuring the cross-plane thermal conductivity of thin film materials. In extension, an alternative improvement for measurement of the in-plane thermal conductivity and …