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Full-Text Articles in Mechanical Engineering
Top-Down Structure And Device Fabrication Using In Situ Nanomachining, Xiaodong Li, Xinnan Wang, Qihua Xiong, Peter C. Eklund
Top-Down Structure And Device Fabrication Using In Situ Nanomachining, Xiaodong Li, Xinnan Wang, Qihua Xiong, Peter C. Eklund
Faculty Publications
We demonstrate the potential of an alternative tool for the fabrication of nanoscale structures and devices. A nanoindenter integrated with an atomic force microscope is shown to be a powerful machine tool for cutting precise length nanowires or nanobelts and for manipulating the shortened wires. We also demonstrate its utility in cutting grooves and fabricating dents (or periodic arrays of dents) in ZnSnanobelts. This approach permits the direct mechanical machining of nanodevices that are supported on a substrate without the inherent complications of e beam or photolithography.
Mechanics Of Hydrogenated Amorphous Carbon Deposits From Electron-Beam-Induced Deposition Of Paraffin Precursor, W. Ding, D. A. Dikin, X. Chen, R. D. Piner, R. S. Ruoff, E. Zussman, X. Wang, Xiaodong Li
Mechanics Of Hydrogenated Amorphous Carbon Deposits From Electron-Beam-Induced Deposition Of Paraffin Precursor, W. Ding, D. A. Dikin, X. Chen, R. D. Piner, R. S. Ruoff, E. Zussman, X. Wang, Xiaodong Li
Faculty Publications
Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron-beam-induced deposition(EBID) has been used to depositcarbonfilms that are similar to those that have recently been used for clamping nanostructures. The film deposition rate was accelerated by placing a paraffin source of hydrocarbon near the area where the EBIDdeposits were made. High-resolution transmission electron microscopy, electron-energy-loss spectroscopy, Raman spectroscopy, secondary-ion-mass spectrometry, and nanoindentation were used to characterize the chemical composition and the mechanics of the carbonaceous deposits. The typical EBIDdeposit was found to be hydrogenated amorphous carbon (a-C:H) having …