Open Access. Powered by Scholars. Published by Universities.®
- Keyword
-
- NEMS (2)
- Active hand device (1)
- Carbon nanotubes (1)
- Chemical sensors (1)
- DNA (1)
-
- Gravimetric sensors; AlN contour-mode resonators; sensitivity; ultra-thin-film AlN. (1)
- Haptic modeling (1)
- Haptic rendering (1)
- Haptography (1)
- Ionic Polymer Metallic Composite (1)
- Kalman filter (1)
- MEMS (1)
- MEMS Filters (1)
- MEMS Resonators (1)
- Magnetic field sensor (1)
- Magnetoelectric materials (1)
- Microsensors (1)
- Microsurgery (1)
- Nanoscaled Contour-Mode Resonators (1)
- Physiological tremor (1)
- Selectivity (1)
- Super High Frequency (1)
- Tremor modeling (1)
- Ultra-Thin-Film AlN (1)
Articles 1 - 7 of 7
Full-Text Articles in Mechanical Engineering
Development Of A Novel Handheld Device For Active Compensation Of Physiological Tremor, Abhijit Saxena
Development Of A Novel Handheld Device For Active Compensation Of Physiological Tremor, Abhijit Saxena
Abhijit Saxena
In microsurgery, the human hand imposes certain limitations in accurately positioning the tip of a device such as scalpel. Any errors in the motion of the hand make microsurgical procedures difficult and involuntary motions such as hand tremors can make some procedures significantly difficult to perform. This is particularly true in the case of vitreoretinal microsurgery. The most familiar source of involuntary motion is physiological tremor. Real-time compensation of tremor is, therefore, necessary to assist surgeons to precisely position and manipulate the tool-tip to accurately perform a microsurgery. In this thesis, a novel handheld device (AID) is described for compensation …
Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan
Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan
Tianxiang Nan
High sensitivity magnetoelectric sensors with their lectromechanical resonance frequencies , 200 kHz have been recently demonstrated using gnetostrictive/piezoelectric magnetoelectric eterostructures. In this work, we demonstrate a novel agnetoelectric nano-electromechanical systems (NEMS) resonator with an electromechanical resonance frequency of 215 MHz based on an AlN/(FeGaB/Al2O3) 3 10 magnetoelectric heterostructure for detecting DC magnetic fields. This magnetoelectric NEMS resonator showed a high quality factor of 735, and strong magnetoelectric coupling with a large voltage tunable sensitivity. The admittance of the magnetoelectric NEMS resonator was very sensitive to DC magnetic fields at its electromechanical resonance, which led to a new detection mechanism for …
Haptography: Capturing And Recreating The Rich Feel Of Real Surfaces, Katherine J. Kuchenbecker, Joseph Romano, William Mcmahan
Haptography: Capturing And Recreating The Rich Feel Of Real Surfaces, Katherine J. Kuchenbecker, Joseph Romano, William Mcmahan
William McMahan
Haptic interfaces, which allow a user to touch virtual and remote environments through a hand-held tool, have opened up exciting new possibilities for applications such as computer-aided design and robot-assisted surgery. Unfortunately, the haptic renderings produced by these systems seldom feel like authentic re-creations of the richly varied surfaces one encounters in the real world. We have thus envisioned the new approach of haptography, or haptic photography, in which an individual quickly records a physical interaction with a real surface and then recreates that experience for a user at a different time and/or place. This paper presents an overview of …
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having vertical …
Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza
Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza
Matteo Rinaldi
A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same die have also …
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices are employed to …