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Full-Text Articles in Mechanical Engineering
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
The Carillon And Its Haptic Signature : Modeling The Changing Force-Feedback Constraints Of A Musical Instrument For Haptic Display, Mark Havryliv, F. Geiger, M. Gurtler, Fazel Naghdy, Greg Schiemer
The Carillon And Its Haptic Signature : Modeling The Changing Force-Feedback Constraints Of A Musical Instrument For Haptic Display, Mark Havryliv, F. Geiger, M. Gurtler, Fazel Naghdy, Greg Schiemer
Greg Schiemer
The carillon is one of the few instruments that elicits sophisticated haptic interaction from amateur and professional players alike. Like the piano keyboard, the velocity of a player’s impact on each carillon key, or baton, affects the quality of the resultant tone; unlike the piano, each carillon baton returns a different force-feedback. Force-feedback varies widely from one baton to the next across the entire range of the instrument and with further idiosyncratic variation from one instrument to another. This makes the carillon an ideal candidate for haptic simulation. The application of synthesized forcefeedback based on an analysis of forces operating …
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) super-high-frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contour-extensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt2, in excess of 1.5%. These devices are employed to synthesize …