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Full-Text Articles in Mechanical Engineering
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Theses and Dissertations
Chemical microsensors are a new field integrating chemical thin film technology with solid-state fabrication techniques to make devices capable of detecting chemicals in the environment. This thesis evaluated commercially available fabrication processes and numerous sensor designs for working chemical sensors. The commercial processes used were MUMPS for surface micromachined devices and MOSIS for bulk micromachined devices. Overall, eight fabrication runs and 29 different designs were made. Of these designs, two were shown to work effectively. Other designs failed due to fabrication problems and design errors that caused release problems. One design that worked was a surface micromachined chemoresistor with interdigitated …
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Theses and Dissertations
Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. …