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Full-Text Articles in Mechanical Engineering
Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert
Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert
Theses and Dissertations
This research examines the physical and electrical processes involved in lifecycle failure of Microelectromechanical (MEMS) Radio-Frequency (RF) cantilever beam ohmic contact switches. Failures of these switches generally occur at the contact, but complete details of performance of microcontacts are difficult to measure and have not been previously reported. This study investigated the mechanics of microcontact behavior by designing and constructing a novel experimental setup. Three representative contact materials of varying microstructure (Au, Au5%Ru, Au4%V2O5) were tested and parameters of contact during cycling were measured. The Au4%V2O5, a dispersion strengthened material developed at …
Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.
Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.
Theses and Dissertations
RF MEMS switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bi-metallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with …