Mechanical Engineering Commons^™

Study Of Demolding Process In Thermal Imprint Lithography Via Numerical Simulation And Experimental Approaches, Zhichao Song

LSU Master's Theses

The objective of present study was to analyze the mechanical behavior of polymer resist during the demolding process, such as stress distribution and evolution; distortion and tilt of microstructures in thermal imprint lithography, a new emerging technique in mass production of micro/nanoscale patterns. One of the most challenging technical issues for thermal imprint lithography is the structural damages during demolding process. Thermal stress, adhesion force and friction force all play important roles in determination of the success of demolding and it is crucial to understand the underlying physics in order to optimize the structure and process design. In present study, …