Mechanical Engineering Commons^™

An Intermediate-Layer Lithography Method For Producing Metal Micron/Nano Patterns And Conducting Polymer-Based Microdevices, Xinchuan Liu

Doctoral Dissertations

Metals have been widely used in the areas of integration circuit (IC) and microelectromechanical systems (MEMS) fields as materials for gates, contact pads, interconnects, corrosion resistance coatings, rectifying contacts, redundancy memories, heating elements, mechanical parts, magnetic component, etc. due to their good properties, such as high electrical conductivity and good thermal conductivity. Conducting polymers, because of their promising potential to replace silicon and metals in building devices, have attracted great attention in recent decades.

Traditional photolithography methods are often used to pattern metals and conducting polymers. However, it cannot be used to fabricate nano patterns because the minimum feature size …