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Full-Text Articles in Mechanical Engineering
Uv-Liga Compatible Electroformed Nano-Structured Materials For Micro Mechanical Systems, Bo Li
Uv-Liga Compatible Electroformed Nano-Structured Materials For Micro Mechanical Systems, Bo Li
Electronic Theses and Dissertations
UV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA a micro molding fabrication process using X-ray to pattern the micro molds. LIGA is an expansive and is limited in access. In comparing to LIGA, the UV-LIGA is a cost effective process, and is widely accessible and safe. Therefore, …
Fabrication Of High Aspect Ratio Vibrating Cylinder Microgyroscope Structures By Use Of The Liga Process, Yohannes Mamo Desta
Fabrication Of High Aspect Ratio Vibrating Cylinder Microgyroscope Structures By Use Of The Liga Process, Yohannes Mamo Desta
LSU Doctoral Dissertations
Inertial grade microgyroscopes are of great importance to improve and augment inertial navigation systems based on GPS for industrial, automotive, and military applications. The efforts by various research groups worldwide to develop inertial grade microgyroscopes have not been successful to date. In 1994, the Department of Mechanical Engineering at Louisiana State University and SatCon Technology Corporation (Boston, Massachusetts) proposed a series of shock tolerant micromachined vibrating cylinder rate gyroscopes with aspect ratios of up to 250:1 to meet the needs of inertial navigation systems based on existing conventional vibrating cylinder gyroscopes. Each microgyroscope consisted of a tall thin shell metallic …