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Full-Text Articles in Mechanical Engineering
Dual-Stage Thermally Actuated Surface-Micromachined Nanopositioners, Neal B. Hubbard
Dual-Stage Thermally Actuated Surface-Micromachined Nanopositioners, Neal B. Hubbard
Theses and Dissertations
Nanopositioners have been developed with electrostatic, piezoelectric, magnetic, thermal, and electrochemical actuators. They move with as many as six degrees of freedom; some are composed of multiple stages that stack together. Both macro-scale and micro-scale nanopositioners have been fabricated. A summary of recent research in micropositioning and nanopositioning is presented to set the background for this work. This research project demonstrates that a dual-stage nanopositioner can be created with microelectromechanical systems technology such that the two stages are integrated on a single silicon chip. A nanopositioner is presented that has two stages, one for coarse motion and one for fine …
Simulation-Based Design Under Uncertainty For Compliant Microelectromechanical Systems, Jonathan W. Wittwer
Simulation-Based Design Under Uncertainty For Compliant Microelectromechanical Systems, Jonathan W. Wittwer
Theses and Dissertations
The high cost of experimentation and product development in the field of microelectromechanical systems (MEMS) has led to a greater emphasis on simulation-based design for increasing first-pass design success and reliability. The use of compliant or flexible mechanisms can help eliminate friction, wear, and backlash, but compliant MEMS are sensitive to variations in material properties and geometry. This dissertation proposes approaches for design stage uncertainty analysis, model validation, and robust optimization of nonlinear compliant MEMS to account for critical process uncertainties including residual stress, layer thicknesses, edge bias, and material stiffness. Methods for simulating and mitigating the effects of non-idealities …