Open Access. Powered by Scholars. Published by Universities.®
- Discipline
Articles 1 - 2 of 2
Full-Text Articles in Mechanical Engineering
Design And Optimization Of Membrane-Type Acoustic Metamaterials, Matthew G. Blevins
Design And Optimization Of Membrane-Type Acoustic Metamaterials, Matthew G. Blevins
Durham School of Architectural Engineering and Construction: Dissertations, Thesis, and Student Research
One of the most common problems in noise control is the attenuation of low frequency noise. Typical solutions require barriers with high density and/or thickness. Membrane-type acoustic metamaterials are a novel type of engineered material capable of high low-frequency transmission loss despite their small thickness and light weight. These materials are ideally suited to applications with strict size and weight limitations such as aircraft, automobiles, and buildings. The transmission loss profile can be manipulated by changing the micro-level substructure, stacking multiple unit cells, or by creating multi-celled arrays. To date, analysis has focused primarily on experimental studies in plane-wave tubes …
Improved Sensitivity Mems Cantilever Sensor For Terahertz Photoacoustic Spectroscopy, Ronald A. Coutu Jr., Ivan R. Medvedev, Douglas T. Petkie
Improved Sensitivity Mems Cantilever Sensor For Terahertz Photoacoustic Spectroscopy, Ronald A. Coutu Jr., Ivan R. Medvedev, Douglas T. Petkie
Faculty Publications
In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam damping. In addition, fabrication yield was improved by approximately 50% by filleting the cantilever’s anchor and free end to help reduce high stress areas that occurred during device fabrication and processing. All of the cantilever sensors were fabricated using silicon-on-insulator (SOI) wafers and tested in a custom …