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Liga Mold Insert Fabrication Using Su-8 Photoresist, Jian Zhang
Liga Mold Insert Fabrication Using Su-8 Photoresist, Jian Zhang
LSU Master's Theses
The LIGA process potentially enables economic mass-production of devices with high aspect ratio geometry. Central to the LIGA process is the fabrication of high quality LIGA molds. But in the traditional LIGA mold insert fabrication process, the x-ray photoresist poly-methyl-methacrylate (PMMA) is not highly sensitive to x-rays and a thick piece of PMMA sheet (>1mm) needs too much time to get exposed (bottom dose: 3500J/cm3), which results in excessive cost/ fabrication difficulty of the mold insert. Thus, in this thesis a negative photoresist SU-8 was tested as an x-ray photoresist in the LIGA fabrication process. SU-8 is much more …