Mechanical Engineering Commons^™

Sputtering Power Effects On Growth And Mechanical Properties Of Cr2alc Max Phase Coatings, Muhammad Naveed, Aleksei Obrosov, Andrzej Zak, Wlodzimierz Dudzinski, Alex A. Volinsky, Sabine Weiß

Mechanical Engineering Faculty Publications

Coating growth and mechanical properties of nanolamellar Cr₂AlC coatings at various sputtering power were investigated in the present study. Cr₂AlC coating was deposited on the IN 718 superalloy and (100) Si wafers by DC magnetron sputtering at different sputtering powers. The structure and properties were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and nanoindentation. It was found that coatings had columnar structure with nanocrystalline substructure. Deposition rate increased with the sputtering power. XRD results showed the presence of the Cr₂AlC MAX phase, intermetallic AlCr₂ and Cr_{7 …}