Mechanical Engineering Commons^™

Plasma Treatment Of Bulk Nb Surface In The Ar/Cl2 Discharge, M. Rašković, L. Vuskovic, S. Popovic, A.-M. Valente-Feliciano, L. Phillips

Physics Faculty Publications

The preparation of the cavity walls has been one of the major challenges in the superconducting radio-frequency (SRF) accelerator technology. Therefore, constant research and development effort is devoted to develop surface preparation processes that will improve roughness and lower the level of impurities, like hydrogen or oxygen, embedded in bulk Nb, having in the same time reasonable etching rates. Plasma based surface modification provides an excellent opportunity to achieve these goals. We present Ar/Cl₂ discharge treatment of bulk Nb where we achieved etching rates comparable to the rates obtained with the electropolishing method without introducing impurities in Nb. The …