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Nanoscience and Nanotechnology

Amorphous SiOC

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Full-Text Articles in Mechanical Engineering

Temperature-Dependent Helium Ion-Beam Mixing In An Amorphous Sioc/Crystalline Fe Composite, Qing Su, Lloyd Price, Lin Shao, Michael Nastasi Jan 2016

Temperature-Dependent Helium Ion-Beam Mixing In An Amorphous Sioc/Crystalline Fe Composite, Qing Su, Lloyd Price, Lin Shao, Michael Nastasi

Department of Mechanical and Materials Engineering: Faculty Publications

Temperature dependent He-irradiation-induced ion-beam mixing between amorphous silicon oxycarbide (SiOC) and crystalline Fe was examined with a transmission electron microscope (TEM) and via Rutherford backscattering spectrometry (RBS). The Fe marker layer (7.2 ± 0.8 nm) was placed in between two amorphous SiOC layers (200 nm). The amount of ion-beam mixing after 298, 473, 673, 873, and 1073 K irradiation was investigated. Both TEM and RBS results showed no ion-beam mixing between Fe and SiOC after 473 and 673 K irradiation and a very trivial amount of ion-beam mixing (~2 nm) after 298 K irradiation. At irradiation temperatures higher than 873 …