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Mechanical Engineering Commons

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Nanoscience and Nanotechnology

2016

Chemical vapor deposition

Articles 1 - 2 of 2

Full-Text Articles in Mechanical Engineering

Modeling Of A Roll-To-Roll Plasma Cvd System For Graphene, Yudong Chen, Majed A. Alrefae, Anurag Kumar, Timothy S. Fisher Aug 2016

Modeling Of A Roll-To-Roll Plasma Cvd System For Graphene, Yudong Chen, Majed A. Alrefae, Anurag Kumar, Timothy S. Fisher

The Summer Undergraduate Research Fellowship (SURF) Symposium

Graphene is a 2D carbon material that has extraordinary physical properties relevant to many industrial applications such as electronics, oxidation barrier and biosensors. Roll-to-roll plasma chemical vapor deposition (CVD) has been developed to manufacture graphene at large scale. In a plasma CVD chamber, graphene is grown on a copper foil as it passes through a high-temperature plasma region. The temperatures of the gas and the copper foil play important roles in the growth of graphene. Consequently, there is a need to understand the temperature and gas velocity distributions in the system. The heat generated in the plasma creates a thermal ...


Laser Direct Written Silicon Nanowires For Electronic And Sensing Applications, Woongsik Nam Aug 2016

Laser Direct Written Silicon Nanowires For Electronic And Sensing Applications, Woongsik Nam

Open Access Dissertations

Silicon nanowires are promising building blocks for high-performance electronics and chemical/biological sensing devices due to their ultra-small body and high surface-to-volume ratios. However, the lack of the ability to assemble and position nanowires in a highly controlled manner still remains an obstacle to fully exploiting the substantial potential of nanowires. Here we demonstrate a one-step method to synthesize intrinsic and doped silicon nanowires for device applications. Sub-diffraction limited nanowires as thin as 60 nm are synthesized using laser direct writing in combination with chemical vapor deposition, which has the advantages of in-situ doping, catalyst-free growth, and precise control of ...