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Full-Text Articles in Mechanical Engineering
Radio Frequency Mems Switch Contact Metal Selection, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane, Kevin D. Leedy
Radio Frequency Mems Switch Contact Metal Selection, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane, Kevin D. Leedy
AFIT Patents
A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results …
Characterization Of Intercalated Graphite Fibers For Microelectromechanical Systems (Mems) Applications, Bryan W. Winningham
Characterization Of Intercalated Graphite Fibers For Microelectromechanical Systems (Mems) Applications, Bryan W. Winningham
Theses and Dissertations
Research was accomplished to characterize the electrical and physical characteristic changes of the Thornel® P-100 carbon fiber and five variants when intercalated with 96% sulfuric acid and incorporated the use of Microelectromechanical Systems (MEMS) structures for testing purposes. The five fiber variants were oxidized in 1 M nitric acid at 0.5 A for 30 seconds, 1 and 2 minutes, the last two samples were detreated at 1150 °C for one hour prior to the nitric acid treatment. The fibers were mounted onto a MEMS die, placed into a chip carrier, sulfuric acid added, the chip carrier sealed and testing accomplished. …