Open Access. Powered by Scholars. Published by Universities.®

Mechanical Engineering Commons

Open Access. Powered by Scholars. Published by Universities.®

Electro-Mechanical Systems

Micromechanics

Articles 1 - 7 of 7

Full-Text Articles in Mechanical Engineering

Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith Dec 2021

Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith

AFIT Patents

A passive microscopic Fabry-Pérot Interferometer (FPI) sensor an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.


Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading Dec 1997

Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading

Theses and Dissertations

In the past few years, microelectromechanical systems (MEMS) have emerged as a promising new technology with tremendous application potential. One of the possible implementations of MEMS technology is in the development of micro-satellites. It should be possible to mass-produce micro-satellites at a fraction of the cost of one conventional satellite. In order for satellites to be robust, a method of transferring power to systems must be addressed. As micro-satellites are made with conventional integrated circuit technologies at a very small scale, a means of transferring power on a similar scale will be investigated. This research addresses the issue of the …


Microelectromechanical Optical Beam Steering Systems, David M. Burns Dec 1997

Microelectromechanical Optical Beam Steering Systems, David M. Burns

Theses and Dissertations

The development of microelectromechanical systems (MEMS) has matured to the point where the fabrication of micron sized devices is feasible. State of the art MEMS construction processes now support the fabrication of novel optical devices that could not previously be built. This dissertation reports on the development of innovative micro optical devices such as Variable Blaze Gratings (VBGs) using state of the art MEMS construction processes. The principle application of the micro optical devices described in this dissertation is steering optical beams; however other applications such as spectral analysis are identified. Specific optical beam steering systems developed and characterized in …


Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts Dec 1996

Modeling And Simulation Of Optical Characteristics Of Microelectromechanical Mirror Arrays, Peter C. Roberts

Theses and Dissertations

MEMS (Micro-Electro-Mechanical Systems) micromirror devices can be used to control the phase of a propagating light wavefront, and in particular to correct aberrations that may be present in the wavefront, due to either atmospheric turbulence or any other type of fixed or time and space varying aberrations. In order to shorten the design cycle of MEMS micromirror devices, computer software is developed to create, from MEMS micromirror device design data, a numerical model of the MEMS device. The model is then used to compute the far field diffraction pattern of a wavefront reflected from the device, and to predict the …


Artificial Cochlea Design Using Micro-Electro-Mechanical Systems, George C. Dalton Ii Dec 1996

Artificial Cochlea Design Using Micro-Electro-Mechanical Systems, George C. Dalton Ii

Theses and Dissertations

The use of Micro-Electro-Mechanical Systems (MEMS) in the design of an artificial cochlea is investigated in depth. Interdigitated finger (comb), cantilever, bridge, and mirror resonators are presented as possible devices used to implement the artificial cochlea. These resonators are demonstrated to be extremely high Q devices, capable of being tuned with a simple DC bias. This suggests a possible change to existing cochlea models that claim highly complex AC feedback as being responsible for changes in the damping of the basilar membrane. The new cochlea model presented here, using MEMS to approximate the tuning of the basilar membrane, may be …


Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene Dec 1995

Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene

Theses and Dissertations

Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. …


Design And Fabrication Of A Micromechanical Gyroscope, Richard M. Kuhns Dec 1995

Design And Fabrication Of A Micromechanical Gyroscope, Richard M. Kuhns

Theses and Dissertations

Both size and cost of mechanical and optical inertial navigation systems (INS) have prevented their use in many applications. By developing a micromachined gyroscope and combining it with existing micromachined accelerometer designs to form a low sensitivity INS, the cost would be reduced by a factor of 10 or more. The lower per unit cost would open new areas for INS use. A second advantage of the micromachined INS would be its size. A micromachined INS would weigh only a few ounces and take significantly less space, allowing more room for electronics and the weight reduction would lead to longer …