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Full-Text Articles in Mechanical Engineering
Design, Fabrication, Testing Of Cnt Based Isfet And Characterization Of Nano/Bio Materials Using Afm, Zhuxin Dong
Design, Fabrication, Testing Of Cnt Based Isfet And Characterization Of Nano/Bio Materials Using Afm, Zhuxin Dong
Graduate Theses and Dissertations
A combination of Carbon Nanotubes (CNTs) and Ion Selective Field Effect Transistor (ISFET) is designed and experimentally verified in order to develop the next generation ion concentration sensing system. Micro Electro-Mechanical System (MEMS) fabrication techniques, such as photolithography, diffusion, evaporation, lift-off, packaging, etc., are required in the fabrication of the CNT-ISFET structure on p-type silicon wafers. In addition, Atomic Force Microscopy (AFM) based surface nanomachining is investigated and used for creating nanochannels on silicon surfaces. Since AFM based nanomanipulation and nanomachining is highly controllable, nanochannels are precisely scratched in the area between the source and drain of the FET where …
Computational Design Of The Electrical And Mechanical Performance Of Steerable Mems Antennas, Morgan Andrew Roddy
Computational Design Of The Electrical And Mechanical Performance Of Steerable Mems Antennas, Morgan Andrew Roddy
Graduate Theses and Dissertations
This thesis describes the origins, improvements, and variations of a broadband microwave antenna that can be beam-steered by a micro-electromechanical system (MEMS). The steerable MEMS antenna of this work was comprised of a planar antenna on top of a Silicon membrane. The membrane is etched to create a gimbal hinge structure and a platform which supported the antenna and gave it one or two degrees of freedom of rotation. The antennas presented were broadband and fed by a coplanar waveguide (CPW) transmission line which traversed the hinge structure. The antenna's orientation in space was designed to be changed through electrostatic …