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Full-Text Articles in Mechanical Engineering
Machine Learning Augmentation Micro-Sensors For Smart Device Applications, Mohammad H. Hasan
Machine Learning Augmentation Micro-Sensors For Smart Device Applications, Mohammad H. Hasan
Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research
Novel smart technologies such as wearable devices and unconventional robotics have been enabled by advancements in semiconductor technologies, which have miniaturized the sizes of transistors and sensors. These technologies promise great improvements to public health. However, current computational paradigms are ill-suited for use in novel smart technologies as they fail to meet their strict power and size requirements. In this dissertation, we present two bio-inspired colocalized sensing-and-computing schemes performed at the sensor level: continuous-time recurrent neural networks (CTRNNs) and reservoir computers (RCs). These schemes arise from the nonlinear dynamics of micro-electro-mechanical systems (MEMS), which facilitates computing, and the inherent ability …
Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.
Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.
AFIT Patents
A novel fabrication process uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems (MEMS) devices. This technique allows the use of positive photomasks with negative resists, opening the door to an ability to create complementary mechanical structures without the fabrication delays and costs associated with having to obtain a negative photomask. In addition, whereas an SU-8 mask would normally be left in place after processing, a technique utilizing a positive photoresist as a release layer has been developed so that the SU-8 masking material can …
Performance Comparison Of Pb(Zr0.52Ti0.48)O3-Only And Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Performance Comparison Of Pb(Zr0.52Ti0.48)O3-Only And Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications
This paper provides a quantitative comparison and explores the design space of lead zirconium titanate (PZT)–only and PZT-on-silicon length-extensional mode resonators for incorporation into radio frequency microelectromechanical system filters and oscillators. We experimentally measured the correlation of motional impedance (RX) and quality factor (Q) with the resonators’ silicon layer thickness (tSi). For identical lateral dimensions and PZT-layer thicknesses (tPZT), the PZT-on-silicon resonator has higher resonant frequency (fC), higher Q (5100 versus 140), lower RX (51 Ω versus 205 Ω), and better linearity [third-order input intercept …