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Electro-Mechanical Systems

Series

2013

Articles 1 - 11 of 11

Full-Text Articles in Mechanical Engineering

Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr. Nov 2013

Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.

AFIT Patents

A novel fabrication process uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems (MEMS) devices. This technique allows the use of positive photomasks with negative resists, opening the door to an ability to create complementary mechanical structures without the fabrication delays and costs associated with having to obtain a negative photomask. In addition, whereas an SU-8 mask would normally be left in place after processing, a technique utilizing a positive photoresist as a release layer has been developed so that the SU-8 masking material can …

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Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan Sep 2013

Metal-Assisted Etching Of Silicon Molds For Electroforming, Ralu Divan, Dan Rosenthal '14, Karim Ogando, Leonidas E. Ocola, Daniel Rosenmann, Nicolaie Moldovan

Student Publications & Research

Ordered arrays of high-aspect-ratio micro/nanostructures in semiconductors stirred a huge scientific interest due to their unique one-dimensional physical morphology and the associated electrical, mechanical, chemical, optoelectronic, and thermal properties. Metal-assisted chemical etching enables fabrication of such high aspect ratio Si nanostructures with controlled diameter, shape, length, and packing density, but suffers from structure deformation and shape inconsistency due to uncontrolled migration of noble metal structures during etching. Hereby the authors prove that a Ti adhesion layer helps in stabilizing gold structures, preventing their migration on the wafer surface while not impeding the etching. Based on this finding, the authors demonstrate …

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Measurement And Description Of Dynamics Required For In Vivo Surgical Robotics Via Kinematic Methods, Jacob G. Greenburg Aug 2013

Measurement And Description Of Dynamics Required For In Vivo Surgical Robotics Via Kinematic Methods, Jacob G. Greenburg

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

With the goal of improved recovery times and reduced trauma to the patient there has been a substantial shift in the medical community’s demand for minimally invasive surgical (MIS) techniques. With the standardization of MIS becoming more commonplace in the medical field there are still many improvements that are desired. Traditional, manual methods of these surgeries require multiple incisions on the abdomen for the tools and instruments to be inserted. The more recent demand has been to localize the incisions into what is being referred to as a Laparoendoscopic Single-Site (LESS) surgery. Furthermore, the manual instruments that are commonly used …

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Micro Modeling Study Of Cathode/Electrolyte Interfacial Stresses For Solid Oxide Fuel Cells, Xinfang Jin, Xingjian Xue May 2013

Micro Modeling Study Of Cathode/Electrolyte Interfacial Stresses For Solid Oxide Fuel Cells, Xinfang Jin, Xingjian Xue

Faculty Publications

Delamination of the cathode/electrolyte interface is an important degradation phenomenon in solid oxide fuel cells (SOFCs). While the thermal stress has been widely recognized as one of the major reasons for such delamination failures, the role of chemical stress does not receive too much attention. In this paper, a micro-model is developed to study the cathode/electrolyte interfacial stresses, coupling oxygen ion transport process with structural mechanics. Results indicate that the distributions of chemical stress are very complicated at the cathode/electrolyte interface and show different patterns from those of thermal stress. The maximum principal stresses take place at the cathode/electrolyte interface …

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Floating Electrode Electrowetting On Hydrophobic Dielectric With An Sio2 Layer, Mehdi Khodayari, Benjamin Hahne, Nathan B. Crane, Alex A. Volinsky May 2013

Floating Electrode Electrowetting On Hydrophobic Dielectric With An Sio2 Layer, Mehdi Khodayari, Benjamin Hahne, Nathan B. Crane, Alex A. Volinsky

Faculty Publications

Floating electrode electrowetting is caused by dc voltage applied to a liquid droplet on the Cytop surface, without electrical connection to the substrate. The effect is caused by the charge separation in the floating electrode. A highly-resistive thermally-grown SiO2 layer underneath the Cytop enables the droplet to hold charges without leakage, which is the key contribution. Electrowetting with an SiO2 layer shows a memory effect, where the wetting angle stays the same after the auxiliary electrode is removed from the droplet in both conventional and floating electrode electrowetting. Floating electrode electrowetting provides an alternative configuration for developing advanced electrowetting-based devices.

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Micro Grids Fabricated For Miniature Ion Thruster, Deborah French, Jesse Taff Apr 2013

Micro Grids Fabricated For Miniature Ion Thruster, Deborah French, Jesse Taff

College of Engineering Poster Presentations

Part of the research at Boise State is a miniaturized plasma propulsion thruster. The purpose of the thruster is to provide the necessary location realignments for small satellites in space. The grid creates an electrostatic field, which extracts plasma ions from an Inductively Coupled Plasma (ICP) source. The ions are propelled toward a collector plate being a second identical grid, which in turn creates the desired thrust. The size and density of the openings in the grid are essential to optimizing the thrust produced. The grid geometry contributes to the ion departure angle (focusing) and the ion transparency. The Stainless …

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Universal Scaling And Intrinsic Classification Of Electro-Mechanical Actuators, Sambit Palit, Ankit Jain, Muhammad A. Alam Apr 2013

Universal Scaling And Intrinsic Classification Of Electro-Mechanical Actuators, Sambit Palit, Ankit Jain, Muhammad A. Alam

Birck and NCN Publications

Actuation characteristics of electromechanical (EM) actuators have traditionally been studied for a few specific regular electrode geometries and support (anchor) configurations. The ability to predict actuation characteristics of electrodes of arbitrary geometries and complex support configurations relevant for broad range of applications in switching, displays, and varactors, however, remains an open problem. In this article, we provide four universal scaling relationships for EM actuation characteristics that depend only on the mechanical support configuration and the corresponding electrode geometries, but are independent of the specific geometrical dimensions and material properties of these actuators. These scaling relationships offer an intrinsic classification for …

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Digitally Programmable Rf Mems Filters With Mechanically Coupled Resonators, Hengky Chandrahalim, Sunil Ashok Bhave Mar 2013

Digitally Programmable Rf Mems Filters With Mechanically Coupled Resonators, Hengky Chandrahalim, Sunil Ashok Bhave

AFIT Patents

A digitally-tunable RF MEMS filter includes a substrate and a plurality of mechanically coupled resonators, wherein a first and a last resonator of the plurality of mechanically coupled resonators are configured to be electrostatically transduced. One or more of the plurality of mechanically coupled resonators are configured to be biased relative to the substrate such that the one or more biased resonators may be brought substantially in contact with the substrate. In a method of digitally tuning an RF MEMS filter having a mechanically coupled resonator array, a DC bias voltage is applied to at least a first resonator and …

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Activity Intent Recognition Of The Torso Based On Surface Electromyography And Inertial Measurement Units, Zhe Zhang Jan 2013

Activity Intent Recognition Of The Torso Based On Surface Electromyography And Inertial Measurement Units, Zhe Zhang

Masters Theses 1911 - February 2014

This thesis presents an activity mode intent recognition approach for safe, robust and reliable control of powered backbone exoskeleton. The thesis presents the background and a concept for a powered backbone exoskeleton that would work in parallel with a user. The necessary prerequisites for the thesis are presented, including the collection and processing of surface electromyography signals and inertial sensor data to recognize the user’s activity. The development of activity mode intent recognizer was described based on decision tree classification in order to leverage its computational efficiency. The intent recognizer is a high-level supervisory controller that belongs to a three-level …

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Project Haiti 2012: Providing An Experiential Learning Experience Through The Design And Delivery Of A Water Purifier In Haiti, Yung Wong, Johnathon Camp, Shavin Pinto, Kyle Fennesy, Marc Compere, Yan Tang Jan 2013

Project Haiti 2012: Providing An Experiential Learning Experience Through The Design And Delivery Of A Water Purifier In Haiti, Yung Wong, Johnathon Camp, Shavin Pinto, Kyle Fennesy, Marc Compere, Yan Tang

Publications

In this paper, we share our experiences and lessons learned from Project Haiti 2012, a project to design and install a water purification system serving 20,000 people per day in the largest tent city in Haiti. Project Haiti 2012 was the third and largest system we have built for Haitians and represents a huge success for all participants and stakeholders. This paper discusses the unique experiential learning opportunity involved in the design and delivery of the water purifier in a foreign developing country. Multiple positive educational, social, and economic outcomes were achieved including students applying knowledge gained from coursework towards …

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The Effect Of Isostatic Pressing On The Dielectric Properties Of Screen Printed Ba0.5Sr0.5Tio3 Thick Films, Siwei Wang, Lingling Zhang, Jiwei Zhai, Fanglin Chen Jan 2013

The Effect Of Isostatic Pressing On The Dielectric Properties Of Screen Printed Ba0.5Sr0.5Tio3 Thick Films, Siwei Wang, Lingling Zhang, Jiwei Zhai, Fanglin Chen

Faculty Publications

Ba0.5Sr0.5TiO3 thick films with B2O3–Li2O glass sintering aid were prepared by the screen printing method on Al2O3 substrates. A 200 MPa isostatic pressure was applied to the films before sintering. After being sintered at 950∘C, lower porosity and denser microstructure was obtained compared with the films without isostatic pressing. The dielectric constant and dielectric loss were 238 and 0.0028, respectively. A tunability of 61.7% was obtained for the isostatic pressed films, a 27.8% enhancement compared to unpressurized films. These results suggest that isostatic pressing …

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