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Electrical and Electronics

Air Force Institute of Technology

Theses and Dissertations

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Full-Text Articles in Mechanical Engineering

Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh Jun 2021

Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh

Theses and Dissertations

Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin …

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Robust Scandium Aluminum Nitride Mems Resonators For L Band Operation In Orbital Environments, Israel W. Dunk Mar 2021

Robust Scandium Aluminum Nitride Mems Resonators For L Band Operation In Orbital Environments, Israel W. Dunk

Theses and Dissertations

This thesis investigates AlN alloyed with scandium in a variety of resonator architectures including WEM, overtone WEM, LEM, and SAW that have the potential to achieve high levels of electrical performance and environmental robustness. SAW resonators operating near 370 MHz are fabricated on polycrystalline Sc.37Al.63N, and AlN with the resulting devices compared and conclusions drawn as to the merits of each material. The design and fabrication of SAW devices is discussed in detail, with the operating characteristics of these resonators then tested both electrically and mechanically. Mechanical characterisation includes analysis of vibration and shock effects on …

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Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard Mar 2007

Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard

Theses and Dissertations

AFRL/MLPJE had developed a novel thermal sensing material termed protein-impregnated-polymer (PIP). Thus far, a proof-of-concept has been demonstrated using a macro-sized pixel (0.64 mm2) as a bolometric detector. In an effort to better characterize this novel thermal sensing material, experimental data was used to determine figures of merit (FOMs) comparative to off-the-shelf thermal detectors. Microelectromechanical (MEMS) pixels were designed and used as the support structure for an inkjet-deposited droplet of the PIP. During the material characterization, two observations were made: PIP is a pyroelectric material, and the polymer (polyvinyl alcohol (PVA)) without the protein was found to be …

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Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko Jun 2005

Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko

Theses and Dissertations

While capacitive radio frequency microelectromechanical (RF MEM) switches are poised to provide a low cost, high isolation, low power alternative to current RF switch technologies, there are still reliability issues limiting switch lifetime. Previous research identified insulator charging as a primary cause of switch failure. Changes in switch pull-in and release voltages were measured to provide insight into the mechanisms responsible for charging and switch failure. A spatial and temporal dependent model was developed to describe silicon nitride's time-dependent charging as a function of applied bias. This model was verified by applying constant biases to metal-silicon nitride-silicon capacitors and tracking …

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Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion Mar 2005

Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion

Theses and Dissertations

Audio systems have been developed which use stereo headphones to project sound in three dimensions. When using these 3D audio systems, audio cues sound like they are originating from a particular direction. There is a desire to apply 3D audio to general aviation applications, such as projecting control tower transmissions in the direction of the tower or providing an audio orientation cue for VFR pilots who find themselves in emergency zero-visibility conditions. 3D audio systems, however, require real-time knowledge of the pilot's head orientation in order to be effective. This research describes the development and testing of a low-cost head …

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A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu Sep 2004

A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu

Theses and Dissertations

Micro-Electro-Mechanical Systems (MEMS) technology holds great promise for future navigation systems because of the reduced size and cost of MEMS inertial sensors relative to conventional devices. Current MEMS devices are much less accurate than standard inertial sensors, but they can still be useful. In this thesis, data was recorded from an inexpensive MEMS inertial measurement unit and integrated with GPS measurements using a tightly-coupled Kalman filter. The overall goal of this research is to investigate the usefulness of MEMS sensors for a small, real-time, low-cost INS/GPS integration. A golf cart was used to collect dynamic data, along with a commercial …

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Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr. Sep 2004

Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.

Theses and Dissertations

RF MEMS switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bi-metallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with …

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Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh Mar 2004

Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh

Theses and Dissertations

Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated with an analytical model, full wave electromagnetic simulation, and laboratory testing. Performance degradation due to parasitic and reflection losses due to the package is considered, and RF feed-throughs of the transmission …

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Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo Mar 2004

Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo

Theses and Dissertations

There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This …

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Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading Dec 1997

Micro-Electromechanical Switches For Micro-Satellite Power Transfer, Glen A. Kading

Theses and Dissertations

In the past few years, microelectromechanical systems (MEMS) have emerged as a promising new technology with tremendous application potential. One of the possible implementations of MEMS technology is in the development of micro-satellites. It should be possible to mass-produce micro-satellites at a fraction of the cost of one conventional satellite. In order for satellites to be robust, a method of transferring power to systems must be addressed. As micro-satellites are made with conventional integrated circuit technologies at a very small scale, a means of transferring power on a similar scale will be investigated. This research addresses the issue of the …

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Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr. Dec 1997

Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.

Theses and Dissertations

Optical scanners play a prominent role in the commercial and military industries. The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle …

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Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps Jun 1995

Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps

Theses and Dissertations

Many different micro-electro-mechanical switches were designed in the Multi-User MEMS processes (MUMPs) and deep x-ray lithography and electroforming (LIGA) processes. The switches were composed of actuators that operated based upon either electrostatic forces or thermal forces. A thermally activated beam flexure actuator that operated based upon differential heating was used extensively. This actuator, which was fabricated in the MUMPs process, was able to deflect up to 12 microns with a total input power of less than 25 mW. The thermal resistance, which was needed to model this actuator, was determined from a material constant, 1.9 ± 0.08 m1.5-°C-W …

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