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Electrical and Computer Engineering

Theses and Dissertations

Actuators

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Full-Text Articles in Mechanical Engineering

Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo Mar 2004

Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo

Theses and Dissertations

There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This …


Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps Jun 1995

Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps

Theses and Dissertations

Many different micro-electro-mechanical switches were designed in the Multi-User MEMS processes (MUMPs) and deep x-ray lithography and electroforming (LIGA) processes. The switches were composed of actuators that operated based upon either electrostatic forces or thermal forces. A thermally activated beam flexure actuator that operated based upon differential heating was used extensively. This actuator, which was fabricated in the MUMPs process, was able to deflect up to 12 microns with a total input power of less than 25 mW. The thermal resistance, which was needed to model this actuator, was determined from a material constant, 1.9 ± 0.08 m1.5-°C-W …