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Theoretical Analysis Of Torsionally Vibrating Microcantilevers For Chemical Sensor Applications In Viscous Liquids, Tao Cai

Dissertations (1934 -)

Dynamically driven microcantilevers excited in the transverse (or out-of-plane) direction are widely used as highly sensitive chemical sensing platforms in various applications. While these devices work very well in air, their performance in liquids is not efficient because of the combination of increased viscous damping and effective fluid mass. In order to improve the characteristics of microcantilevers in liquid environments, some other vibration modes such as the torsional mode and lateral (or in-plane) flexural mode have been proposed.
In this work, the characteristics of torsionally vibrating rectangular microcantilevers with length L, width b and thickness h in viscous liquids are …