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Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.
Microelectromechanical Scanner Using A Vertical Cavity Surface Emitting Laser, Joseph G. Bouchard Jr.
Theses and Dissertations
Optical scanners play a prominent role in the commercial and military industries. The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle …