Mechanical Engineering Commons^™

Control Of Single- And Dual-Probe Atomic Force Microscopy, Muthukumaran Loganathan

Doctoral Dissertations

“Atomic force microscope (AFM) is one of the important and versatile tools available in the field of nanotechnology. It is a type of probe-based microscopy wherein an atomically sharp tip, mounted on the free end of a microcantilever, probes the surface of interest to generate 3D topographical images with nanoscale resolution. An integral part of the AFM is the feedback controller that regulates the probe deflection in the presence of surface height changes, enabling the control action to be used for generating topographical image of the sample. Besides sensing, the probe can also be used as a mechanical actuator to …

Design, Modeling, Fabrication, And Testing Of A Multistage Micro Gas Compressor With Piezoelectric Unimorph Diaphragm And Passive Microvalves For Microcooling Applications, Shawn Thanhson Le

Doctoral Dissertations

This dissertation investigates the development of a multistage micro gas compressor utilizing multiple pump stages cascaded in series to increase the pressure rise with passive microvalves and piezoelectric unimorph diaphragms. This research was conducted through modeling, simulation, design, and fabrication of the microcompressor and its components. A single-stage and a two-stage microcompressor were developed to demonstrate and compare the performance and effectiveness of using a cascaded multistage design.

Steady fluid flow through static microvalves structure was studied to gain insight on its gas flow dynamics and characteristics. Transient analysis combined with the structure's interaction was investigated with an analytical model …