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Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar

Electronic Theses and Dissertations

Highly sensitive biosensors capable of detecting and characterizing smallest quantities of cellular and molecular targets are needed in pharmaceutical and medical diagnostics industries. In this work, the importance of biological target recognition specifically proteins through microarray technologies has been discussed and the most successful tools and techniques have been studied. Moreover, a thermally actuated Micro Electro-Mechanical Systems (MEMS) resonator has been demonstrated and fabricated in this work as an accurate, reliable and low cost biotechnology tool. As a proof of concept, amine to epoxide coupling of octadecylamine to functionalized silicon dioxide surface have been shown through resonator frequency monitoring. The …