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Mechanical Engineering Commons

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Acoustics, Dynamics, and Controls

Air Force Institute of Technology

Theses and Dissertations

Microelectromechanical systems

Publication Year

Articles 1 - 2 of 2

Full-Text Articles in Mechanical Engineering

Increasing The Sensitivity Of Surface Acoustic Wave (Saw) Chemical Sensors And Other Chemical Sensing Investigations, Nina R. Smith Mar 2010

Increasing The Sensitivity Of Surface Acoustic Wave (Saw) Chemical Sensors And Other Chemical Sensing Investigations, Nina R. Smith

Theses and Dissertations

The work involves the fabrication and testing of three different surface acoustic wave (SAW) device designs, an investigation of nanowires sensitive to chemicals and preconcentrator prototypes to include with chemical sensors. The SAW chemical sensor designs include modifications to a basic SAW device to see if the sensitivity of the SAW device is increased. The modifications consist of etched trenches along the propagation field, coating the device with carbon nanotubes (CNTs) under the chemically sensitive layer and coating CNTs on top of the chemically sensitive layer. SAW devices are coated with Nafion®, a polymer sensitive to ethanol. The tests indicate …


Microelectromechanical Isolation Of Acoustic Wave Resonators, James R. Reid Jr. Dec 1996

Microelectromechanical Isolation Of Acoustic Wave Resonators, James R. Reid Jr.

Theses and Dissertations

Microelectromechainical systems (MEMS) is a rapidly expanding field of research into the design and fabrication of actuated mechanical systems on the order of a few micrometers to a few millimeters. MEMS potentially offers new methods to solve a variety of engineering problems. A large variety of MEMS systems including flip-up platforms, scanning micromirrors, and rotating micromirrors are developed to demonstrate the types of MEMS that can be fabricated. The potential of MEMS for reducing the vibration sensitivity of surface acoustic wave and surface transverse wave resonators is then evaluated. A micromachined vibration isolation system is designed and modeled. A fabrication …