Materials Science and Engineering Commons^™

Design, Implementation, And Test Of A Micro Force Displacement System, Evan Derek Cate

Master's Theses

The design and implementation of a micro-force displacement system was completed to test the force-displacement characteristics of square silicon diaphragms with side lengths of 4mm, 5mm, and 7mm with a thickness of 10um. The system utilizes a World Precision Instruments Fort 10g force transducer attached to a World Precession Instruments TBM4M amplifier. A Keithley 2400 source meter provided data acquisition of the force component of the system. A micro prober tip was utilized as the testing probe attached to the force transducer with a tip radius of 5um. The displacement of samples was measured using a Newport M433 linear stage …

Design, Fabrication, And Characterization Of A Thin-Film Nickel-Titanium Shape Memory Alloy Diaphragm For Use In Micro-Electro-Mechanical Systems, Brian Joel Alvarez

Master's Theses

Previous work done at Cal Poly has shown that thin-film nickel-titanium (NiTi) can be easily sputtered onto silicon wafers and annealed to create a crystallized shape memory alloy (SMA) film. Initial work on creating devices yielded cantilevers that were highly warped due to thin-film stress created during the sputtering process. The objective of this work was to create a thin-film NiTi SMA device that could be better characterized. A membrane was selected due to the simplicity of fabrication and testing which would also oppose the thin-film stress due to the increase in attachment points to the substrate.

Silicon wafers were …