Materials Science and Engineering Commons^™

Metal-Organic Chemical Vapor Deposition Of Sr-Co-Fe-O Films On Porous Substrates, C.-F. Xia, P. Atanasova, Robert W. Schwartz, T. L. Ward

Mechanical and Aerospace Engineering Faculty Research & Creative Works

Aerosol-assisted chemical vapor deposition using the b-diketonate precursors Sr(tmhd)2•2H2O, Fe(tmhd)3 and Co(tmhd)3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1-yO3-d onto porous a-Al2O3 substrates. Single-phase SrCoyFe1-yO3-d perovskite films were obtained at a deposition temperature of 550°C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric-pressure, and led to a supported film which was leak-tight to N2 flow.