Materials Science and Engineering Commons^™

Fabrication Of Functional Nano-Structured Materials And Devices Using Supercritical Fluids, Shengkai Li

Doctoral Dissertations

Nano-structured materials possess unconventional properties and enable miniaturization of devices. However, fabrications of such materials and devices are challenging and in many cases cumbersome, and development of nanofabrication techniques are essential to realizing novel designs and commercializing scientific ideas. Supercritical fluids possess a unique combination of gas-like diffusion properties and liquid-like dissolution power, and are suitable reaction media for fabricating materials at the nanometer scale. This dissertation focuses on developing supercritical fluids-related techniques for fast and large-scale fabrication of novel composite materials and devices. Using supercritical fluid deposition (SFD) technique, cobalt thin films were deposited on a variety of substrates, …