Materials Science and Engineering Commons^™

Contributions To The Performance Of Thin Film Capacitors For High Reliability Applications, Daniel Krueger

Doctoral Dissertations

"Capacitors are critical devices in microelectronic assemblies that must be incorporated into electronic systems through a variety of ways such as integrated or discrete devices. This work has developed new thin film capacitors deposited directly onto multichip module or printed circuit board surfaces to benefit from closer integration that enhances system performance for use in high reliability applications. The capacitors serve as filters or provide tuning and energy storage functions. Unexpected performance was observed during development that included low adhesion of the films to the substrates, higher effective dielectric constants than reported in literature, and low yields. Three publications resulted …