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Full-Text Articles in Materials Science and Engineering
White Light Interferometric Surface Profiler, Vincent Toal, Brian Bowe
White Light Interferometric Surface Profiler, Vincent Toal, Brian Bowe
Articles
We describe an optical system for 3-D profilometry based on the white light interferometer. We detail a simple way to construct a profiler that uses two simple algorithms which deal efficiently and quickly with the data. The system has a theoretically unlimited range and can deal with rough and smooth surfaces