Materials Science and Engineering Commons^™

Growth, Characterization, And Mechanical Testing Of Diamond-Like Carbon Films, Tailei Qi

LSU Master's Theses

The high residual stresses within diamond-like carbon (DLC) films limit its thickness and make the film tend to delaminate from the substrate and be defective on the surface. To address this problem, a new plasma enhanced chemical vapor deposition system (PECVD) was set up to investigate the effects of different film growth parameters on the DLC films, such as chromium doping, gas fluxes, depositing pressures, bias voltages, and depositing times. After the film growth parameters were optimized, this condition was transferred from silicon wafer to SS316 steel plate to deposition of DLC films with some adjustments. Scanning electron microscopy (SEM) …