Engineering Science and Materials Commons^™

Synthesis, Structure And Properties Of Nanolayered Dlc/Dlc Films, Pankaj Gupta

LSU Master's Theses

Diamondlike carbon (DLC) films have been explored extensively in the past due to their highly attractive properties. However, the high level of internal stress developed during growth prevents deposition of thick films. Synthesis of DLC/DLC multilayers (DDM) presents a venue to overcome this drawback. In the present study, DLC films and DDM were deposited on Si substrate using dc plasma of CH₄ and Ar gas mixture. FTIR was used to analyze the structure of the DLC films. Mechanical properties of the films were characterized by microhardness testing and nanoindentation. The tribological properties were studied by conducting pin-on-disc experiments in …