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Silicon Carbide Capacitive High Temperature Mems Strain Transducer, Richard P. Weisenberger

Theses and Dissertations

Air Force Research Lab Air Vehicles directorate performs research on hypersonic vehicles. To verify materials or designs of hypersonic vehicles, they have a need to measure strain at temperatures exceeding 700°C. Strain sensors have the ability to measure strain. Strain is the deformation of materials due to internal stresses in a material. Internal stresses occur when a material is subjected to a force. Traditional strain sensors use Piezoresistive effects to measure strain, which is temperature dependent and making them unusable at high temperatures. This paper discusses a novel strain sensing device, sensing capacitance instead of piezoresistance. The strain sensor is …