Engineering Science and Materials Commons^™

Multifunctional Nanocomposite Co-Containing Diamondlike Carbon Thin Films, Fengli Wang

LSU Doctoral Dissertations

Metal-containing, hydrogenated carbon films (Me-a-C:H) is a special class of nanocomposite films of particular interest since they can be multifunctional through the synergistic interaction of their individual components. Thus, nanocomposite thin films possess high potential in a wide field of engineering applications, especially in small scale devices. A series of multifunctional nanocomposite Co-a-C:H thin films have been synthesized by a hybrid chemical vapor deposition (CVD) and physical vapor deposition (PVD) process to uncover the relationship between synthesis, microstructure and properties. The effects of deposition parameters on the microstructural evolution and properties have been systematically studied. The results showed that the …